KLA Corporation specializes in creating, manufacturing, and distributing advanced solutions vital for process control, process optimization, and yield enhancement throughout the global ...
The C-suite executives form a cohesive leadership team driving the company's financial strategy and innovation.
| Name | Title | Compensation | Gender | Year Born | Status |
|---|---|---|---|---|---|
| Richard Wallace | President, Chief Executive Officer & Executive Director | USD 4,944,883 | 1960 | Active | |
| Bren D. Higgins | Executive Vice President & Chief Financial Officer | USD 2,218,065 | 1970 | Active | |
| Ahmad A. Khan | President of Semiconductor Products & Customers | USD 2,215,707 | 1974 | Active | |
| Brian W. Lorig | Executive Vice President of KLA Global Services | USD 1,332,995 | 1974 | Active | |
| Mary Beth Wilkinson | Executive Vice President, Chief Legal Officer & Corporate Secretary | USD 1,205,871 | 1973 | Active | |
| Ben Bin-Ming Tsai | Chief Technology Officer & Executive Vice President of Corporate Alliances | USD 998,019 | — | 1959 | Active |
| Virendra A. Kirloskar | Senior Vice President & Chief Accounting Officer | USD 455,182 | 1963 | Active | |
| Randi Polanich | Senior Vice President & Chief Communications Officer | — | — | Active | |
| John Van Camp | Executive Vice President & Chief Human Resources Officer | — | — | Active | |
| Kevin Kessel | Vice President of Investor Relations | — | — | Active |
| Filing Date | Year | Name | Position | Level | Salary | Bonus | Stock Award | Option Award | Incentive | Other | Total |
|---|---|---|---|---|---|---|---|---|---|---|---|
| 2025-09-23 | 2025 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $1.19M | $0 | $20.15M | $0 | $3.70M | $50.09K | $25.09M |
| 2025-09-23 | 2025 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $750.00K | $0 | $5.49M | $0 | $1.43M | $34.99K | $7.71M |
| 2025-09-23 | 2025 | Ahmad Khan | President President, Semiconductor Products and Customers | C-Level | $750.00K | $0 | $5.49M | $0 | $1.43M | $32.63K | $7.71M |
| 2025-09-23 | 2025 | Oreste Donzella | Former Former Executive Vice Vice President President and Chief Chief Strategy Officer | C-Level | $362.56K | $0 | $915.79K | $0 | $466.72K | $4.79M | $6.54M |
| 2025-09-23 | 2025 | Brian Lorig Executive | Vice Vice President President, KLA Global Services | C-Level | $543.65K | $0 | $3.66M | $0 | $775.86K | $13.49K | $5.00M |
| 2025-09-23 | 2025 | Mary Beth Wilkinson Executive | Vice Vice President President, Chief Chief Legal Officer & Corporate Secretary | C-Level | $555.56K | $0 | $1.92M | $0 | $619.84K | $30.47K | $3.13M |
| 2025-09-23 | 2024 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $1.13M | $0 | $19.70M | $0 | $1.98M | $28.43K | $22.83M |
| 2025-09-23 | 2024 | Oreste Donzella | Former Former Executive Vice Vice President President and Chief Chief Strategy Officer | C-Level | $501.25K | $0 | $1.81M | $0 | $407.81K | $4.96M | $7.67M |
| 2024-09-24 | 2024 | Oreste Donzella Executive | Vice Vice President President and Chief Chief Strategy Officer | C-Level | $501.25K | $0 | $1.81M | $0 | $407.81K | $4.96M | $7.67M |
| 2025-09-23 | 2024 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $758.17K | $0 | $5.86M | $0 | $810.57K | $28.65K | $7.45M |
| 2025-09-23 | 2024 | Ahmad Khan | President President, Semiconductor Products and Customers | C-Level | $758.17K | $0 | $5.86M | $0 | $810.57K | $27.51K | $7.45M |
| 2025-09-23 | 2024 | Brian Lorig Executive | Vice Vice President President, KLA Global Services | C-Level | $521.25K | $0 | $2.66M | $0 | $584.10K | $10.80K | $3.78M |
| 2025-09-23 | 2024 | Mary Beth Wilkinson Executive | Vice Vice President President, Chief Chief Legal Officer & Corporate Secretary | C-Level | $525.00K | $0 | $2.40M | $0 | $495.60K | $30.13K | $3.45M |
| 2025-09-23 | 2023 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $1.00M | $0 | $23.49M | $0 | $2.12M | $28.06K | $26.64M |
| 2025-09-23 | 2023 | Ahmad Khan | President President, Semiconductor Products and Customers | C-Level | $650.00K | $0 | $9.98M | $0 | $920.40K | $26.85K | $11.57M |
| 2025-09-23 | 2023 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $643.46K | $0 | $9.74M | $0 | $875.74K | $27.66K | $11.28M |
| 2025-09-23 | 2023 | Oreste Donzella | Former Former Executive Vice Vice President President and Chief Chief Strategy Officer | C-Level | $477.38K | $0 | $4.01M | $0 | $441.80K | $965.13K | $5.90M |
| 2024-09-24 | 2023 | Oreste Donzella Executive | Vice Vice President President and Chief Chief Strategy Officer | C-Level | $477.38K | $0 | $4.01M | $0 | $441.80K | $965.13K | $5.90M |
| 2025-09-23 | 2023 | Brian Lorig Executive | Vice Vice President President, KLA Global Services | C-Level | $496.73K | $0 | $4.37M | $0 | $506.01K | $10.58K | $5.38M |
| 2025-09-23 | 2023 | Mary Beth Wilkinson Executive | Vice Vice President President, Chief Chief Legal Officer & Corporate Secretary | C-Level | $525.00K | $0 | $3.89M | $0 | $545.16K | $28.53K | $4.99M |
| 2024-09-24 | 2022 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $997.12K | $0 | $15.30M | $0 | $2.95M | $1.32M | $20.57M |
| 2024-09-24 | 2022 | Ahmad Khan | President President, Semiconductor Process Control (Semi PC), Electronics, Packaging and Components (EPC), and KLA Instruments | C-Level | $641.35K | $0 | $4.76M | $0 | $1.21M | $458.03K | $7.07M |
| 2024-09-24 | 2022 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $594.23K | $0 | $4.31M | $0 | $1.14M | $432.59K | $6.47M |
| 2022-09-22 | 2022 | Mary Beth Wilkinson Executive | Vice Vice President President, Chief Chief Legal Officer & Corporate Secretary | C-Level | $518.08K | $0 | $2.95M | $0 | $806.15K | $55.61K | $4.33M |
| 2024-09-24 | 2022 | Oreste Donzella Executive | Vice Vice President President and Chief Chief Strategy Officer | C-Level | $457.69K | $4.94K | $1.70M | $0 | $716.31K | $782.60K | $3.66M |
| 2024-09-24 | 2022 | Brian Lorig Executive | Vice Vice President President, Global Support and Services | C-Level | $472.12K | $0 | $1.81M | $0 | $735.38K | $185.68K | $3.21M |
| 2023-09-21 | 2021 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $975.00K | $0 | $9.34M | $0 | $2.90M | $500.76K | $13.71M |
| 2023-09-21 | 2021 | Ahmad Khan | President President, Semiconductor Process Control | C-Level | $575.00K | $0 | $3.85M | $0 | $1.14M | $199.06K | $5.76M |
| 2023-09-21 | 2021 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $550.00K | $0 | $3.30M | $0 | $1.09M | $227.15K | $5.16M |
| 2022-09-22 | 2021 | Mary Beth Wilkinson Executive | Vice Vice President President, Chief Chief Legal Officer & Corporate Secretary | C-Level | $369.23K | $350.00K | $3.00M | $0 | $165.00K | $14.06K | $3.90M |
| 2023-09-21 | 2021 | Brian Lorig Executive | Vice Vice President President, Global Support and Services | C-Level | $444.23K | $0 | $1.65M | $0 | $608.72K | $68.45K | $2.77M |
| 2023-09-21 | 2021 | Oreste Donzella Executive | Vice Vice President President, Electronics, Packaging & Components | C-Level | $435.38K | $0 | $1.54M | $0 | $603.14K | $103.41K | $2.68M |
| 2022-09-22 | 2020 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $966.92K | $0 | $8.80M | $0 | $2.61M | $951.13K | $13.32M |
| 2022-09-22 | 2020 | Ahmad Khan | President President, Semiconductor Process Control | C-Level | $569.62K | $0 | $4.11M | $0 | $1.02M | $209.05K | $5.90M |
| 2022-09-22 | 2020 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $543.08K | $0 | $3.52M | $0 | $1.00M | $221.68K | $5.28M |
| 2020-09-23 | 2020 | Teri Little | Former Former Executive Vice Vice President President, Corporate Secretary and Chief Chief Legal Officer | C-Level | $405.96K | $0 | $1.64M | $0 | $492.26K | $89.77K | $2.63M |
| 2020-09-23 | 2020 | Brian Lorig Executive | Vice Vice President President, Global Support and Services | C-Level | $400.00K | $0 | $1.52M | $0 | $499.20K | $54.14K | $2.48M |
| 2022-09-22 | 2020 | Oreste Donzella Executive | Vice Vice President President, Electronics, Packaging & Components | C-Level | $400.00K | $0 | $1.47M | $0 | $480.48K | $103.91K | $2.45M |
| 2020-09-23 | 2019 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $900.00K | $0 | $15.98M | $0 | $2.31M | $1.32M | $20.51M |
| 2019-09-20 | 2019 | Amichai Steimberg | CEO CEO of Orbotech | Founder / CEO | $171.64K | $0 | $5.72M | $0 | $0 | $1.88M | $7.77M |
| 2020-09-23 | 2019 | Ahmad Khan | President President, Semiconductor Process Control | C-Level | $525.00K | $0 | $5.75M | $0 | $847.88K | $327.97K | $7.45M |
| 2019-09-20 | 2019 | Asher Levy | Former Former CEO CEO of Orbotech | Founder / CEO | $110.60K | $0 | $4.72M | $0 | $0 | $2.36M | $7.19M |
| 2020-09-23 | 2019 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $522.31K | $0 | $5.22M | $0 | $824.20K | $340.12K | $6.91M |
| 2019-09-20 | 2019 | Brian Trafas Executive | Vice Vice President President, Global Customer Organization | C-Level | $500.00K | $0 | $4.18M | $0 | $680.02K | $239.37K | $5.60M |
| 2020-09-23 | 2019 | Teri Little | Former Former Executive Vice Vice President President, Corporate Secretary and Chief Chief Legal Officer | C-Level | $397.31K | $0 | $2.76M | $0 | $404.04K | $255.54K | $3.82M |
| 2020-09-23 | 2018 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $900.00K | $0 | $6.68M | $0 | $3.22M | $1.59M | $12.39M |
| 2018-09-28 | 2018 | Richard P. Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $900.00K | $0 | $6.68M | $0 | $3.22M | $1.59M | $12.39M |
| 2020-09-23 | 2018 | Ahmad Khan | President President, Semiconductor Process Control | C-Level | $507.31K | $0 | $2.30M | $0 | $1.04M | $327.93K | $4.17M |
| 2018-09-28 | 2018 | Ahmad A. Khan Executive | Vice Vice President President, Global Products Group | C-Level | $507.31K | $0 | $2.30M | $0 | $1.04M | $327.93K | $4.17M |
| 2020-09-23 | 2018 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $500.00K | $0 | $2.00M | $0 | $1.10M | $416.50K | $4.02M |
| 2018-09-28 | 2018 | Bren D. Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $500.00K | $0 | $2.00M | $0 | $1.10M | $416.50K | $4.02M |
| 2019-09-20 | 2018 | Brian Trafas Executive | Vice Vice President President, Global Customer Organization | C-Level | $464.62K | $0 | $1.63M | $0 | $800.00K | $266.99K | $3.16M |
| 2020-09-23 | 2018 | Teri Little | Former Former Executive Vice Vice President President, Corporate Secretary and Chief Chief Legal Officer | C-Level | $375.00K | $0 | $890.13K | $0 | $530.00K | $42.79K | $1.84M |
| 2018-09-28 | 2018 | Teri A. Little Executive | Vice Vice President President, Chief Chief Legal Officer and Secretary | C-Level | $375.00K | $0 | $890.13K | $0 | $530.00K | $42.79K | $1.84M |
| 2019-09-20 | 2017 | Richard Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $900.00K | $0 | $10.98M | $0 | $1.10M | $1.60M | $14.58M |
| 2018-09-28 | 2017 | Richard P. Wallace | President President & Chief Chief Executive Officer | Founder / CEO | $900.00K | $0 | $10.98M | $0 | $1.10M | $1.60M | $14.58M |
| 2019-09-20 | 2017 | Bren Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $482.31K | $0 | $3.76M | $0 | $340.96K | $253.23K | $4.83M |
| 2018-09-28 | 2017 | Bren D. Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $482.31K | $0 | $3.76M | $0 | $340.96K | $253.23K | $4.83M |
| 2019-09-20 | 2017 | Ahmad Khan | President President, Semiconductor Process Control | C-Level | $475.00K | $0 | $3.00M | $0 | $348.58K | $412.00K | $4.23M |
| 2018-09-28 | 2017 | Ahmad A. Khan Executive | Vice Vice President President, Global Products Group | C-Level | $475.00K | $0 | $3.00M | $0 | $348.58K | $412.00K | $4.23M |
| 2019-09-20 | 2017 | Brian Trafas Executive | Vice Vice President President, Global Customer Organization | C-Level | $400.00K | $0 | $2.00M | $0 | $239.18K | $308.67K | $2.95M |
| 2018-09-28 | 2017 | Brian M. Trafas Executive | Vice Vice President President, Global Customer Organization | C-Level | $400.00K | $0 | $2.00M | $0 | $239.18K | $308.67K | $2.95M |
| 2018-09-28 | 2016 | Ahmad A. Khan Executive | Vice Vice President President, Global Products Group | C-Level | $478.85K | $0 | $1.38M | $0 | $1.10M | $372.65K | $3.32M |
| 2018-09-28 | 2016 | Bren D. Higgins Executive | Vice Vice President President & Chief Chief Financial Officer | C-Level | $457.69K | $0 | $1.38M | $0 | $1.10M | $255.64K | $3.19M |
Sum of disclosed compensation by year (USD million)
Top founder/C-level executives over time (USD million)